Tag Archives: nodes

(Is an) 8 (nanometer node possible?)

Photo: IMEC The two-step Three scanning electron microscope photos of different examples of LELE double patterning, each one showing the final result. The dark-colored features were printed in one lithography/etch step, and the light-colored features in the second lithography/etch step. ——————————————————————————————— In an article from 2008 in Spectrum, the possibility of an 8 nanometer node [...]

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